Denton Explorer 14
High Vacuum Deposition System
The Denton Explorer 14 is a high vacuum system equipped with a turbomolecular pump and a mechanical backing pump which is capable of depositing one to two metals, either simultaneously or in layers. The thickness of each layer can be controlled down to the nanometer by utilizing two individual quartz crystal microbalances. The materials that are available to deposit are extensive and even materials that haven't been deposited before can be attempted with enough information. The materials and the tungsten boats are provided by the user. Some materials that form alloys with tungsten require different types of boats. This information is available to view and download below. Also included are the SOPs for the Denton.
